Measuring Microscope

Measuring microscope is an optical measuring microscope used to require high accuracy with inspection of sample that become bigger gradually such as FPD and wafer probe card. Basically, there can be use length measurement of triaxial with installing linear scale of resolution 0.1um of high accuracy to X, Y, Z triaxial and there is able to accuracy measure by using various application through measure by using various application through measured data and manufacture is available by auto inspection system through accurate linear motor or servo motor also there were made microscope faithfully by using Nikon's optical system in inspection field as well as measuring field.

Features

1. It is possible for coordinate, measuring to trace as well as auto inspection work.
   
2. It can save contents by recipe.
   
3. It can reduce the working time at repeat work by making Recipe
   
4. There can be control microscope through touch screen.
   
5. There can control moving of stage and speed on control panel
   
6. There can rotate objective lens and control Epi&Dia illuminator.

Measuring microscope is possible use general inspection as well as various measuring work. Also all order made microscopes set up Vibration Isolation system basically to minimize influence in inspection, measuring.

Inspection Microscope Specification