MASK Inspection/Measurement

Origin	Korea
Model Number	LS1700CNC

Order-made microscope is hybrid microscope system that can keep in satisfaction on each customer/client's needs. All order-made microscope is available manufacture to various stage size for inspection, measurement.

Mask Inspection/Measurement(LS1700CNC)

Measurement/inspection microscope(Metal/Photo) for Mask of Lab system Inc. is equipped with the Stage for Mask which is specially devised after considering various size and Frame with a characteristic of Mask Sample. Automatically, various sizes of Mask can be set in required size and move to the next stage. If setting value or needed size your input, width of Stage is automatically controlled and if the sensor of Stage's fore-end sense object, automatically move into to the position of objective lens of microscope.

Also, when get to the needed place, Mask Frame automatically goes under transfer-rail and fixes. You can control very precise measurement and inspection for Mask and operation of Hardware only on the computer program screen through our developed program and Auto Focusing Unit. Using 0.1um resolving power of high precise linear motor can lead to maximize the sophistication on the 3 axes of X, Y, Z. It is designed not to be affected by very minute vibration by using the vibration Isolation system and Obsidian Surface Plate.

Loading Type

1. After Mask is built in the Loader, you can set automatically loading system to fit the size of Mask during Loading.
   
2. You can put and load only Metal Sheet of Metal Mask on the Glass or After glass built-in, you can also load.
   
3. You can do Loading/Unloading by the program and can conduct both occasions on whether glass or not.
   Therefore, it is so convenient to measure whim check for Frame and Metal Sheet.

Mask Inspection/Measurement Specification